Izixazululo Zezinzwa Zokucindezela Izimotu

Izinhlobo nezici zezinzwa zokucindezela

Izinhlobo zezinzwa zokucindezela zifaka phakathi ifilimu i-suttering, i-silicon piezoresistance, i-salin gauges, isafire, ingilazi microfusion, i-ceramic piezoresistance, i-capacience yengcindezi ye-ceramic, njll. Ukukhiqizwa kobuningi basekhaya ikakhulukazi yi-silicon piezoresistance, i-ceramic piezoresistance, ingilasi i-microfusion namandla wengcindezi ye-ceramics, izici zalezi zinhlobo zezinzwa zethulwa ngezansi:

1. Silicon piezoresistance

LefooKusetshenziswa umphumela we-piezoresistive nokwehla okuhle kwezinto ze-semiconductor, inzwa ye-silicon piezoresistive yenziwe ngobuchwepheshe besifunda obuhlanganisiwe nobuchwepheshe bokucubungula i-MEMS. Njengamanje, usayizi omncane we-silicon piezoresistance ungaba phakathi kuka-0.5 * 0.5 mm, ukuze ku-wafer 8-intshi cishe 100, Izinzwa zokucindezela zinganqunywa. Inzwa ye-Silicon piezoresistive, njengohlobo lwezinzwa ezincane, inezinzuzo zosayizi omncane, ukukhishwa okuphezulu, izindleko eziphansi, Ikhono eliqinile lokulayishwa ngokweqile, ikhono eliqinile lokulwa nokuphazamiseka, nokuzwela okuphezulu kokukhipha isignali. Njengoba iphakethe elijwayelekile livame ukwamukela ukwakheka kwengcindezi enhle, ngokuvamile ingalinganisa kuphela imithombo yezindaba emsulwa futhi engeyona i-harrosive, futhi ukushisa kokushisa kukhulu kakhulu, futhi ukuhamba okugcwele kokushisa kungafinyelela ku-0.15% F. S /℃.

Njengamanje, kunezakhiwo ezimbili zokupakisha ezisetshenziswa kakhulu ze-silicon piezoresistive pressure cores: ezingahlukanisiwe futhi zihlukanisiwe. Uhlobo olungahlukanisiwe ngokuvamile lufakwe igobolondo lepulasitiki, futhi ubuso be-chip ye-silicon buvikelwe yi-silicone gel. Lesi sakhiwo sifaneleke kakhulu ukucindezela okuningi kokudla kwezimoto, Ukukala kwengcindezi yamasondo kanye nengcindezi yomkhathi kunezinzuzo ezisobala ebangeni nezindleko. Ingasetshenziswa futhi ukukala ingcindezi kawoyela wenjini, amanzi, negesi yokukhipha ngemuva kokupakisha ngeglue ekhethekile, kepha inkinga yempilo yenkonzo kunzima ukuyixazulula. Ukupakisha kokuhlukaniswa ngokuvamile kusebenzisa indlela yangaphakathi yokugcwalisa uwoyela ye-diaphragm yensimbi. Le ndlela yokupakisha ingasetshenziselwa ukubulala noma ukungcolisa imithombo yezindaba njengowoyela wenjini, isiqandisi, uphethiloli, igesi yokukhipha, njll., kepha ngenxa yenqubo eyinkimbinkimbi yokugcwalisa uwoyela, izindleko zokukhiqiza ziphezulu, uma kuqhathaniswa nezinye izinhlobo zezinzwa Intengo / ukusebenza akusobala.

Ngaphezu kwalezi zindlela ezimbili ezingenhla zokupakisha, ekhayaUmkhiqizi wenzwa wengcindeziNjengamanje kuthuthukisa isakhiwo sokupakisha okuguquliwe. Lesi sakhiwo sixhumana ngqo ne-dielectric ngemuva kwe-silicon wafer, okungagwema ubungozi bokugqwala nokungcola kwesekethe ebusweni be-silicon wafer. Lapho inqubo yokupakisha okuguquliwe isivuthiwe, inzwa ye-silicon piezoresistive izokulungela izinhlelo eziningi.

Isithombe 1-1 esihlukanisiwe sokucindezela kwe-silicon

2. I-Ceramic piezoresistance

Ubuchwepheshe be-Ceramic resistor busebenzisa inqubo ejiyile yokuphrinta amafilimu ukuphrinta ibhuloho le-Wheatstone ebusweni besakhiwo se-ceramic, futhi usebenzisa umphumela we-varistor ukuguqula isignali yengcindezi ye-mediam ibe yisiginali yamandla. I-Ceramic iyinto eyaziwayo ene-relasticity enkulu, ukumelana nokugqwala, ukugqoka ukumelana, umthelela nokumelana nokudlidliza.

Ukuzinza okushisayo kobumba kanye nokumelana kwayo kwefilimu okujiyile kungakwenza ibanga lokushisa layo lokusebenza eliphakeme ku--40 kuya ku-135 ℃, futhi ukufakwa kukagesi yi-2 kV. Amandla aphezulu anjalo okufakwa kunzima ukuthi ezinye izinzwa zifezeke. Njengamanje, abakhiqizi abaningi basekhaya bahlinzeka ngobumba. Inzwa yengcindezi yokumelana. Kodwa-ke, ukuzwela kokukhipha isignali kwalobu buchwepheshe kuphansi, ububanzi buvame ukukhawulelwa ku-500kPa ~ 10MPa, futhi isakhiwo esijwayelekile esingenalutho sincike kuphela ekucindezelweni kwe-diaphragm, enokumelana okungapheli. Lapho ingcindezi yendawo okufanele ilinganiswe ileyishwa ngokweqile, inzwa yokumelana ne-ceramic izoba nokuqhekeka kwe-diaphragm. Ingozi yokuvuza kwabezindaba. ICeramic piezoresistance ilungele ukusetshenziswa kokulinganisa kwengcindezi kwefriji, uwoyela wenjini namabhuleki.

Umnyombo we-ceramic piezoresistive sensor unesinxephezelo sayo sokushisa, futhi ukushisa kokushisa kungazuza u-0.02% F. s /℃, ngakho-ke ezinhlelweni eziningi, akukho sinxephezelo lokushisa okudingekayo, okunganciphisa izindleko zokukhiqiza. Inkinga yokukhukhuleka kwesikhathi yezinzwa ezijwayelekile ze-ceramic piezoresistive ivele kakhulu, ezidinga ukuthengwa kwezinto eziphakeme nezinqubo zokukhiqiza.

Umdwebo 1-2 Ceramic piezoresistive core

3. Ukuncibilika okuncane kwengilazi

Ubuchwepheshe bengilazi obuncibilikisayo busebenzisa inqubo yokushisa okuphezulu yokuhlanganisa igeji ye-silicon ne-lain engenagqiba Isakhiwo sensimbi. TAbane abaphikisi abalingana ne-silicon strain gauge yakha ibhuloho le-Wheatstone. Lapho kunengcindezi ephakathi ngakolunye uhlangothi lwe-diaphragm yensimbi engagqwali, i-diaphragm yensimbi engagqwali ikhiqiza ukukhubazeka okuncane okubangela ukuthi ibhuloho lishintshe, ukwakha isignali yamandla ngokulingana noshintsho lwengcindezi. Inqubo yokuncibilikisa ingilazi kunzima ukuyifeza futhi izindleko ziphezulu. Izinzuzo eziyinhloko ukubekezelelana okuhle okuphakathi nokumelana nomthwalo oqinile. Ngokuvamile ilungele ingcindezi ephezulu kanye namabanga wengcindezi ephezulu, njenge-10MPa ~ 200MPa, futhi ukusetshenziswa kwayo kulinganiselwe.

Izinzwa zokucindezela kwengilazi ezincane zinezinzuzo ezisobala kuzinhlelo zokusebenza okungcindezi okuphezulu njengesitimela esivamile kadizili, loader hydraulics, namaphampu kaphethiloli. Okwezicelo ezingaphansi kwe-2MPa, ayikho inzuzo yezindleko. Ngaphezu kwalokho, ukushisa kokushisa kwenzwa yokuncibilikisa ingilazi yengcindezi ilingana naleyo ye-silicon piezoresistive sensor, futhi isinxephezelo sokushisa siyadingeka ukufeza ukunemba okudingekayo ngesikhathi sokulinganiswa.

Umdwebo 1-3 Glass

4. Umthamo wengcindezi yeCeramic:

Ubuchwepheshe be-ceramic ingcindezi-volume yamukela isisekelo se-ceramic esimisiwe kanye nesakhiwo se-ceramic diaphragm esiguqukayo, futhi i-diaphragm ehambayo iyavalwa futhi ilungiswe nesisekelo ngokusebenzisa ingilazi. Amaphethini we-electrode aphrintiwe ngaphakathi phakathi kwalaba bobabili ukwakha i-capacitor eguquguqukayo. Lapho ingcindezi ye-diaphragm ishintsha, amandla phakathi kwalezi zinguquko. Isignali iyaguqulwa futhi ibhalwe yi-chip yesimo bese ikhipha esigabeni esilandelayo sokusetshenziswa.

Ubuchwepheshe beCeramic ingcindezi-capacitance bunezinzuzo zebanga elibanzi, izici ezinhle zokushisa, amandla aqinile okulayishwa ngokweqile, nokuzinza okuhle kwesikhathi eside. Isetshenziswa kabanzi ekulinganisweni kwengcindezi yefriji, uwoyela wenjini, ibhuleki, uphethiloli, njll. Ingqikithi yengcindezi ye-Ceramic-capacitance inezici ezinhle zokushisa, ngokwesibonelo, ukushisa kokushisa komgoqo we-2MPa kungcono kune-0.5% F. nge-100 ° C.

Umdwebo 1-4 umongo we-Ceramic ingcindezi-capacitance core

Ubuchwepheshe be-ceramic ingcindezi-capacitance basekhaya buvuthiwe kakhulu. Inqubo yokukhiqiza ye-ceramic ingcindezi-capacitance cores ilula kunaleyo ye-piezoresistive cores, futhi izindleko zokukhiqiza ziphansi kune-piezoresistive. Manje amanani entengo ye-ceramic pressure-capacitance cores nama-ceramic piezoresistive cores abe yisicaba. Izinzuzo ezingokwemvelo zamandla wengcindezi ye-ceramic zenza ilungele ikakhulukazi ukusebenza okuthembekile okuphezulu.